
MEMS Mirror
DC-DC series
| series number | UM-6010 | |
|---|---|---|
| IMAGE | ![]() | |
| TYPE | 2D Mirror | |
| Mirror size | 1.2*1.2mm | |
| Package Dimension | 17*10*2.65mm | |
| Frequency | DC to 2400 Hz (Fast) DC to 1600 Hz (Slow) | |
| Scan Angle | Fast: +/- 3.5 Slow: +/- 3.5 |
2D Mirror series
| series number | UM-6002 | UM-6006 |
|---|---|---|
| IMAGE | ![]() | ![]() |
| TYPE | 2D Mirror | 2D Mirror |
| Mirror size | 1.2*1mm | 1.7*1.7mm |
| Package Dimension | 10.8*5.6*2.5 mm | 17.0*10*2.65mm |
| Frequency | 27500 Hz (Fast) DC to 500 Hz (Slow) | 14500 Hz (Fast) DC to 500 Hz (Slow) |
| Scan Anglee | Fast: +/-10 Slow: +/-11 | Fast: +/-10 Slow: +/-5 |
1D Mirror series
| series number | UM-6004 | |
|---|---|---|
| IMAGE | ![]() | |
| TYPE | 1D Mirror | |
| Mirror size | 3.6*5.5mm | |
| Package Dimension | 17.0*10*2.65mm | |
| Frequency (Hz) | DC to 500 Hz | |
| Scan Anglee | +/-7 |




